HomeFacilitiesInstrumentsLakeshore Cryogenic Probe Stations

Lakeshore Cryogenic Probe Stations

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Two probe stations for probing up to 100mm diameter wafers with up to 6 probes (DC or RF up to 40 GHz). Systems are turbo-pumped to ~10^-5 Torr.  Probes are viewed via high-resolution microscope (10:1 zoom, 3 micron ultimate resolution), CCD camera (still and video capture available) and color monitor. Measurement instrumentation normally kept with the systems include Agilent B1500A Device Analyzer and 4284A LCR meter for I-V measurements, capacitance measurements, and pulsed I-V measurements.

The smaller TTP4 probe station (Lakeshore-Tabletop-Magnetic-Cryogenic-Probe-System) accepts a 50 mm sample with 4 probes and has a custom-designed electromagnet providing in-plane magnetic field up to 1400 Gauss.  Cryostat with Lakeshore controller for low temperature operation and integrated heater for 4 to 350 K temperature range with 0.05 K temperature stability. Cooling is performed with constant flow of liquid nitrogen or helium (EH&S cryogen safety training required) and the sample shield and probes are cooled via the cryostat.

The larger probe station (Lakeshore-Full-Wafer-Vacuum-Probe-System) can accommodate samples up to 100 mm with 6 probes and built-in chuck biasing.  The system includes a manually-controlled stage heater which can be heated up to 350 K.

For rates information, please see the rates page.

Primary Contact

Steve Kriske
Clark Hall, Room D-21
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