HomeFacilitiesInstrumentsADE Phase Shift MicroXAM Optical interferometric profiler

ADE Phase Shift MicroXAM Optical interferometric profiler

Bard Hall B56

Non-contact 3D surface profiler Measures roughness, finish and texture of surfaces ranging from highly polished surfaces in optics, wafers and disk media to rough surfaces such as rolled steel and aluminum, paper, plastics, and ceramics. Characterize 3D microstructure such as micro-electronic mechanical systems (MEMs).

Primary Contact

Philip Carubia
607/255-6757
pmc228@cornell.edu
Bard Hall, Room B-57
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